SENTECH Instruments GmbH

SENTECH develops, manufactures, and globally sells innovative capital equipment centred on thin films in semiconductor technology, microsystems, photovoltaics, nanotechnology and materials research. SENTECH is an expert in the structuring and deposition of thin films by means of plasma process technology. SENTECH offers systems for plasma etching, plasma-enhanced chemical vapour deposition, and atomic layer deposition. SENTECH provides innovative solutions for non-contact, non-invasive optical characterization using ellipsometry and reflectometry.


Founded in 1990, SENTECH is a reliable partner to industry and scientific institutions with leading-edge equipment, global sales and service network.


SENTECH consists of the R&D and manufacturing company SENTECH Instruments located in Berlin and SENTECH Gesellschaft für Sensortechnik operating from Krailling near Munich. +49 (0) 30 6392 5520



Important Dates
  • Deadline for Submission of Abstracts

    Jan 20, 2022

  • ​Abstract Acceptance Notification

    Feb 15, 2022

  • Deadline for Early Bird Registration

    Mar 31, 2022